JPH0252428U - - Google Patents
Info
- Publication number
- JPH0252428U JPH0252428U JP13221588U JP13221588U JPH0252428U JP H0252428 U JPH0252428 U JP H0252428U JP 13221588 U JP13221588 U JP 13221588U JP 13221588 U JP13221588 U JP 13221588U JP H0252428 U JPH0252428 U JP H0252428U
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical axis
- exposure
- diffuser plate
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000001902 propagating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13221588U JPH0252428U (en]) | 1988-10-07 | 1988-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13221588U JPH0252428U (en]) | 1988-10-07 | 1988-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252428U true JPH0252428U (en]) | 1990-04-16 |
Family
ID=31388973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13221588U Pending JPH0252428U (en]) | 1988-10-07 | 1988-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252428U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012238657A (ja) * | 2011-05-10 | 2012-12-06 | Dainippon Printing Co Ltd | 露光装置及び露光用光学装置 |
-
1988
- 1988-10-07 JP JP13221588U patent/JPH0252428U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012238657A (ja) * | 2011-05-10 | 2012-12-06 | Dainippon Printing Co Ltd | 露光装置及び露光用光学装置 |
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